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The performance of functional nanomaterials in catalysis, sensing, and surface engineering depends strictly on the chemical states and depth distribution of elements within the topmost atomic layers. This talk highlights the important role of high-resolution X-ray Photoelectron Spectroscopy (XPS) and Angle-Resolved XPS (ARXPS) in solving complex structural and chemical puzzles at the nanoscale [1-3]. We demonstrate the power of ARXPS to reconstruct the morphology, thickness, and coverage parameters of non-continuous nanometric platinum films without destroying the sample geometry. Moving beyond planar models, we showcase how high-resolution XPS tracks electronic state modifications, pyrolytic doping mechanisms, and metal-support interactions in multi-component systems. These include nitrogen-doped silica architectures, biomass-based mixed oxide catalysts, and engineered coatings designed for advanced adsorption. By correlation of angular emission data with precise chemical shifts, we establish a comprehensive metrology framework. This approach accurately distinguishes true surface mechanisms from bulk properties, driving the rational design of next-generation devices and interfaces.
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