Nicholas Lockyer | HRDP 2026 | Galoá Proceedings

Manchester University

Nicholas Lockyer

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SIMS depth profiling multi-layer materials with polyatomic cluster ion beams
N. Lockyer ¹
S. Sheraz ²
N. Sano ³
¹ Manchester University
² University of Manchester
³ Ionoptika (United Kingdom)
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342971

Secondary Ion Mass Spectroscopy and Alternative Depth Profiling Methods

Invited talk

Co-authors (2)